A Compact High-Sensitivity Temperature Sensor using an Encapsulated Clamped-Clamped Mems Beam Resonator

In this paper, the design and experimental results of a resonator-based temperature sensor are presented. The sensor consists of an electrostatically-actuated clamped-clamped microbeam resonator. The device is fabricated using XMB10 industrial process and is encapsulated under low pressure. The resonance frequency and the output amplitude of the resonator are measured under different temperatures. Conventionally, coupled resonators are utilized to achieve high temperature coefficient of frequency (TCf). Here, we show a high TCf of -325 ppm/°C and a resolution of 0.023 °C using a clamped-clamped resonator. Also, the resonator consumes 6.8 pico-joules, which makes it an attractive candidate for low-energy applications.