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Obtaining of non-stoichiometric titanium oxide using reactive magnetron sputtering
Obtaining of non-stoichiometric titanium oxide using reactive magnetron sputtering
2018
S.Y. Udovichenko
A.N. Bobylev
D A Belotserkovtseva
D D Shpindyuk
Keywords:
Sputter deposition
Stoichiometry
Titanium oxide
Materials science
Inorganic chemistry
Computer engineering
Chemical engineering
Sputtering
reactive magnetron
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