The Utilization of Carbon Dioxide to Prepare TiCxOy Films with Low Friction and High Anti-Corrosion Properties

Recycling carbon dioxide (CO2) for weakening the greenhouse effect is still an outstanding question. Although many chemical methods have been designed for CO2 conversion, they is still a need to develop new ways for CO2 recycling. Plasma methods were employed to convert CO2 into energy molecules, with the addition of H2, H2O and so on. Non heavy elements, like Ti, Cr, Si and Mo and so forth, were employed to take part in a reactive process, which might be very interesting for special scientific interest. In this work, magnetron sputtering method was used not only for igniting the plasma but also for providing Ti elements involved in reactions, via the selected Ti target. One can confirm that the TiCxOy films were successfully grew via sputtering a Ti target in CO2 atmosphere with Ar as dilute gas, which proved that CO2 is a key player in the matter of the involvement of excited CO2+, CO+, CO3− and so on, in the growth process reacting with Ti ions. The TiCxOy films exhibit the highest hardness (20.3 GPa), lowest friction coefficient (0.065) and the best corrosion resistance. The growth of the TiCxOy films are not only a new strategy for consuming CO2 but also a good way for reusing it for preparing TiCxOy films with high hardness for anti-corrosion and reducing friction. Moreover, reducing CO2 emissions via energy saving (through reducing friction and corrosion resistance) and recycling existing CO2 are both important for mitigating the greenhouse effect.