Out-of-plane axis SOI MEMS gyroscope with initially displaced vertical sensing comb

D Maeda,Heewon Jeong,C. Takubo,M. Degawa,K. Yamanaka,M. Shoji,Yasushi Goto

Out-of-plane axis SOI MEMS gyroscope with initially displaced vertical sensing comb

2011

D Maeda
Heewon Jeong
C. Takubo
M. Degawa
K. Yamanaka
M. Shoji
Yasushi Goto

We developed a capacitive silicon on insulator (SOI) microelectro-mechanical systems (MEMS) tuning-fork gyroscope and describe its structure and performance.

Keywords:

Capacitive sensing
Vibrating structure gyroscope
Silicon on insulator
Microfabrication
Control engineering
Electronic engineering
Microelectromechanical systems
Materials science
Vibration
Gyroscope
out of plane
Optoelectronics

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