Nanoindentation Derived Mechanical Properties of Au Thin Film Deposited by Pulsed Laser Sputtering on Si Substrate

Behavior of the mechanical properties of the Au thin film deposited by pulsed laser sputtering technique was studied using nanoindentation at different values of maximum indentation load. The investigation was supplemented by the measurement of the coating thickness and research of the surface relief using scanning electron microscopy. The microgeometrical parameters of the Au film were calculated using 3D optical microscopy. The behavior of the diagrams, demonstrating dependencies of indentation depth on the load applied, was analyzed using the observation of indentation imprints on the optical microscope.