Scratch-resistant hydrophobic and oleophobic coatings prepared by simple PECVD method

A simple and conventional PECVD method was adopted to synthesize scratch-resistant hydrophobic and oleophobic films, by varying the process condition. The film was designed to be 3 layered. The first SiOx layer was coated on the substrate using OMCTS and O2, followed by O2 plasma treatment; hydrocarbon-based hydrophobic film was synthesized using HMDS as a second layer; and finally, CFx-based film was coated using C2F6. The first and second layers were synthesized using RF power of 13.56 MHz, while MF power of 40 kHz was used for the CFx layer for ion-assisted deposition. The water contact angle was measured to be 110°–115°, and the oil contact angle was 84° for the best obtained sample. The pencil hardness was measured to be 7H for anti-scratch property. XPS was adopted to analyze the chemical structure and showed that highly cross-linked dense structured film was synthesized.