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Direct ion content measurements in a non-sputtering magnetron discharge
Direct ion content measurements in a non-sputtering magnetron discharge
2019
A V Kaziev
D V Kolodko
D G Ageychenkov
A. V. Tumarkin
M.M. Kharkov
T. V. Stepanova
Keywords:
Optics
Ion
Physics
Cavity magnetron
Sputtering
Optoelectronics
ion content
Correction
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