Fluoride damage to substrates during stripping of mirrors

Fluorides are useful low-index materials that can be used to enhance reflectivity of over-coated metallic films. In particular, YF3 has been suggested as a useful low-stress low-index material in the IR where film layers must be thicker, and it has also been found to enhance durability in silver-based mirrors. However, if these mirrors need to be stripped for recoating, care must be taken with the stripping process to avoid damaging a silica-based substrate through production of hydrofluoric acid. We present data that such damage can occur, and discuss empirically-derived alternative stripping processes in place of the normal acid-based approach to mitigate the danger.