Synthesis, Properties and Structure of Arc-PVD Molybdenum and Molybdenum Nitride Monolayer Coatings

The paper deals with the synthesis of coating based on molybdenum and molybdenum nitrides using cathodic arc deposition without the plasma assistance. The properties, composition and structure of the obtained coating are studied in detail. It is found that the nitrogen partial pressure in the gas mixture affects the nitrogen concentration in the coatings and the properties of the latter. The structure and phase composition of the coatings synthesized at a low partial pressure, are investigated by using the X-ray diffraction analysis and scanning electron microscopy.