Sputter-deposited erbium-doped Y2O3 active optical waveguides

A signal enhancement of 10dB at 1535nm with a low launched pump power of 1 mW at 1480nm is achieved for sputtered Er3+ : Y2O3 channel waveguides on oxidised silicon substrates. With the developed reactive co-sputtering process using sputterguns the erbium concentration can be varied easily and reproducibly.