Influence of natural oxidation to control the particle size and enhance the number density during subsequent sputtering growth of silver nanoparticle thin film

Controlling the particle size and enhancing the number density during the growth of silver nanoparticle thin film by sputtering technique is reported. Such films are deposited by subsequent sputtering method, where sputtering of the material is followed by an intermediate exposure of ambient for surface oxidation process on formerly grown film. The control on particle size is explained using formation of ultra-thin surface oxide capping layer on the nanoparticle film. Morphological imaging of the films performed by field emission scanning electron microscope (FESEM) show that the particle number density increases for longer time of deposition while the particle size remains nearly constant. The X-ray diffraction is performed for the identification of grain size that also matches the FESEM results.