Microfabrication of two layer structures of electrically isolated wires using self-assembly to guide the deposition of insulating organic polymer

Abstract The fabrication of two layer structures of electrically isolated wire — crossed wire structures and a surface coil inductor — is described. The fabrication process utilizes the tools of soft lithography and incorporates two levels of self-assembly. The use of microcontact printing and patterned self-assembly of liquid polymers removes the need for registration of the insulating layer with the underlying layer as required in conventional lithography techniques. The performance characteristics of the surface coil inductor are measured and closely resemble those predicted by theory.