Titanium-aluminum-chromium alloy target material and preparation method thereof

The invention provides a titanium-aluminum-chromium alloy target material and a preparation method thereof. The alloy target material is prepared from the following components in atom percentage: 5-75 percent of titanium, 10-90 percent of aluminum and 1-20 percent of chromium. The preparation method comprises the steps of preparing alloy powder, carrying out cold isostatic pressing treatment, degassing, carrying out heat isostatic pressing treatment and mechanically processing. The titanium-aluminum-chromium alloy target material has the advantages of high compactness, no pores or segregation, uniform texture, fine crystalline grain and the like, and is suitable for sputtering coatings of multiple cutters and molds.