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Crystallization of the Sputtered P-doped Si Films for High Performance Poly-Si TFT
Crystallization of the Sputtered P-doped Si Films for High Performance Poly-Si TFT
2012
Nishinohara Takuma
Shirai Katsuya
Suzuki Toshiharu
Okada Tatsuya
Noguchi Takashi
Ohachi Tadashi
Matsushima Hideki
Hashimoto Takao
Ogino Yoshiaki
Sahota Eiji
Keywords:
Crystallization
Thin-film transistor
Doping
Sputtering
Inorganic chemistry
Materials science
Optoelectronics
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