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Effect of Species Density and Ion Scattering During Ashing on Ultra Low-$\kappa $ Inter-Level Dielectric Films
Effect of Species Density and Ion Scattering During Ashing on Ultra Low-$\kappa $ Inter-Level Dielectric Films
2005
Worsley
Stacey F. Bent
Nicholas C. M. Fuller
T.L. Tai
James P. Doyle
M. Rothwell
Timothy J. Dalton
Keywords:
Ashing
Dielectric
Scattering
Ion
Analytical chemistry
Chemistry
Kappa
Materials science
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