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Ultra Shallow Junction Formation Using Plasma Doping and Laser Annealing for Sub-65 nm Technology Nodes
Ultra Shallow Junction Formation Using Plasma Doping and Laser Annealing for Sub-65 nm Technology Nodes
2005
Guk Hyon Yon
Soo-jin Hong
Gyoung-Ho Buh
Tai-su Park
Yu-gyun Shin
U In Chung
Joo-Tae Moon
Keywords:
Analytical chemistry
Nanotechnology
Doping
Plasma
Annealing (metallurgy)
Laser
Materials science
shallow junction
Optoelectronics
laser annealing
Correction
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