Additive deposition and patterning of ferroelectric materials on non-planar surfaces by chemical-solution methods

Recent developments and understanding for the deposition and patterning of ferroelectric thin layers are reported. Two patterning techniques are described for mediated chemical solution deposition by: (i) microcontact printing (/spl mu/-CP), and (ii) micromolding in capillaries (MIMIC). These additive soft-lithographic methods are demonstrated for the patterning of sol-gel derived lead zirconate titanate (PZT) films on non-planar surfaces.