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Reactions Between the Ta‐Pt‐Ta‐Au Metallization and PtSi Ohmic Contacts
Reactions Between the Ta‐Pt‐Ta‐Au Metallization and PtSi Ohmic Contacts
1975
Howard M. Day
Aristos Christou
W. H. Weisenberger
J. K. Hirvonen
Keywords:
Sputtering
Ohmic contact
Transistor
Chemistry
Inorganic chemistry
Silicon
Metallurgy
Microwave
Correction
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