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Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating
Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating
2017
tosifumi konisi
Toshifumi Konishi
daisuke yamane
Daisuke Yamane
huangzhaozuobu
Teruaki Safu
kun i tin
Chun-Yi Chen
Tso-Fu Mark Chang
hiroyuki itou
Hiroyuki Ito
sirou mitimasa
Shiro Dosho
noboru isihara
Noboru Ishihara
masahito sone
Masato Sone
katuyuki matida
Katsuyuki Machida
kazuya masu
Kazuya Masu
sin'iti iida
Shin’ichi Iida
Keywords:
Microelectromechanical systems
Materials science
Composite material
Gold plating
Optoelectronics
mems sensors
Correction
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