III-V/Ge Multijunction Solar Cell with Through Cell Via Contact Fabrication and Characterization

In this paper, we present a complete microfabrication process for III-V/Ge triple junction solar cells with through cell via contacts. This architecture enables the transfer of the front side busbars and grid lines contact to the back side by using insulated and metallized vias to reduce both the shading and the resistive losses. Functional solar cells have been electrically characterized to demonstrate this through cell via contact proof of concept.