Parabolic Capillary Optics with less than 50 μm Focus and Large Focal Distance for Synchrotron Radiation Scattering

We report the design and performance of a unique parabolic focusing optics for a general purpose materials research station at the bending magnet BM20 (ROBL‐CRG) at ESRF. The measured gain between 8–12 keV was >1000, the focal spot <40 μm at a focal length of 235 mm (8 keV) and 244 mm (11.5 keV), respectively, which allows the use of special sample environments around the focus spot. The low divergence of <0.15° especially permits the in situ characterization of stress states in copper dual inlaid interconnect micro‐structures as well as the measurement of far‐field diffraction patterns of planar waveguides. First test results will be shown and the advantages of the parabolic focusing optics discussed.