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High-quality sputter-grown layered chalcogenide films for phase change memory applications and beyond
High-quality sputter-grown layered chalcogenide films for phase change memory applications and beyond
2020
Yuta Saito
Paul Fons
Alexander V. Kolobov
Kirill V. Mitrofanov
Kotaro Makino
Junji Tominaga
Shogo Hatayama
Yuji Sutou
Muneaki Hase
John David Robertson
Keywords:
Sputtering
Physics
Optoelectronics
Phase-change memory
Analytical chemistry
Chalcogenide
Correction
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