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Al-Ni-La-Si-based Al alloy sputtering target and its manufacturing method
Al-Ni-La-Si-based Al alloy sputtering target and its manufacturing method
2008
katutosi takagi
yuuki iwasaki
masaya tokuhira
asahi nanbu
genryuu oti
hirosi gotou
nobuyuki kawakami
Keywords:
Sputtering
Alloy
Metallurgy
Materials science
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