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The Effect of Underlayer Texture on Cu Film Orientation in Cu/Refractory-Metal Structure
The Effect of Underlayer Texture on Cu Film Orientation in Cu/Refractory-Metal Structure
1997
Kazuhide Abe
Yusuke Harada
Hiroshi Onoda
Keywords:
Refractory metals
Inorganic chemistry
Materials science
Metallurgy
Correction
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