Energetic deuterium and helium irradiation effects on chemical structure of CVD diamond

Abstract The effects of energetic deuterium and helium irradiation on the chemical structure of CVD diamond and the existing states of the deuterium were investigated by means of the XPS technique. The variations of C1s XPS spectra indicated a change of diamond structure under both ion irradiations. The C1s chemical shift of D 2 + irradiation was smaller than that of He + irradiation, and the chemical shift was −0.6 and −2.5 eV, respectively. The variation of the C1s FWHM of D 2 + irradiation was also smaller than that of He + irradiation, and the FWHM was 0.1 and 0.7 eV, respectively. This difference in the chemical shift and FWHM could be explained by the formation of C–D bond between carbon atoms and the trapped deuterium atoms.