External-Energy-Assisted Nanomachining with Low-stiffness Atomic Force Microscopy Probes

Abstract Thermal atomic force microscope (AFM) nanolithography enables many nanofabrication applications, but it requires special thermal probes. In this paper, we developed a vibration-assisted sample heating approach to implement the nanomachining of poly(methyl methacrylate) (PMMA) with a regular AFM probe with low stiffness (~0.16 N/m). The joule heating softens the PMMA, which lowers the normal force. The in-plane vibration with high frequency was applied to reduce the adhesion force between the AFM tip and the PMMA with elevated temperature, which enhances nanomachining performances. By using this approach, uniform nanopatterns with controllable dimensions were fabricated on PMMA films with small setpoint force.