Dielectric and optical properties of zirconium titanate thin films by reactive DC magnetron co-sputtering

Zirconium titanate thin films were deposited on alumina substrates by DC magnetron reactive co-sputtering by varying substrate temperature and the effects of substrate temperature on optical and dielectric properties of the films have been studied intensively by available characterization techniques. The optical parameters were determined by Swanepoel's method. The films exhibited high transmittance in the visible region and the optical band gap of the films varied from 3.1 to 2.8 eV as the temperature varied from 33 to 400°C. The film deposited at room temperature exhibit a high transmittance of 71%. Dielectric constant measurements have been carried out at 10 GHz of frequency. The dielectric constant increased with increase in temperature and the film deposited at 400oC exhibited a high dielectric constant (40) and a low dielectric loss (0.026).