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First LSI Applicable Thin SOI Films Formed by Lateral Solid Phase Epitaxy
First LSI Applicable Thin SOI Films Formed by Lateral Solid Phase Epitaxy
2009
Hirokazu Ishida
Fumiki Aiso
Makoto Mizukami
Kiyohito Nishihara
Tadashi Iguchi
Daigo Ichinose
Atsushi Fukumoto
Takashi Suzuki
Fumitaka Arai
Ichiro Mizushima
Keywords:
Nanotechnology
Epitaxy
Analytical chemistry
Silicon on insulator
Materials science
Optoelectronics
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