Ferroelectric nonvolatile memories for embedded applications

1998 
Ferroelectric nonvolatile memories offer low voltage operation and fast write speeds that makes them attractive for embedded applications. The fundamentals of ferroelectric materials and ferroelectric memory operation are reviewed. Also discussed is the process integration of ferroelectric capacitors into a CMOS flow. A test circuit which embedded an 8 Kbit ferroelectric memory into a Motorola HC 11E9 microcontroller is reported.
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