Old Web
English
Sign In
Acemap
>
Paper
>
次波長金屬光柵的設計、製作與量測; Design and Fabrication of Subwavelength Metal-stripe Gratings by E-beam Lithography Technology
次波長金屬光柵的設計、製作與量測; Design and Fabrication of Subwavelength Metal-stripe Gratings by E-beam Lithography Technology
2003
huangyulong
Yuan-lung Huang
Keywords:
X-ray lithography
Electron-beam lithography
Optics
Next-generation lithography
Materials science
Metal
Optoelectronics
Fabrication
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]