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低温反应溅射沉积 α -(Al,Cr) 2 O 3 膜
低温反应溅射沉积 α -(Al,Cr) 2 O 3 膜
2018
Wanqi Qiu
wangshulin
Yitian Cheng
liuzhongwu
Xichun Zhong
Dongling Jiao
Kesong Zhou
Keywords:
Materials science
low temperature deposition
Sputtering
Analytical chemistry
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