Single- and few-layer transfer-printed CVD MoS 2 nanomechanical resonators with enhancement by thermal annealing

We report on experimental demonstration of single- and few-layer chemical vapor deposited (CVD) molybdenum disulfide (MoS 2 ) nanomechanical resonators by employing a scalable transfer-print method. CVD MoS 2 crystals are released from their growth substrates (with well-preserved, uniform crystal quality) by a water-assisted lift-off technique, and suspended over pre-patterned arrays of microtrenches through an all-dry, aligned transfer process. We measure device performance from the resulting single- and few-layer drumhead resonators (1–2μm in diameter), showing fundamental resonance frequencies (f0) up to ∼80 MHz, and figures-of-merit (f0×Q up to ∼2.4×10 10 Hz. We quantify the uniformity of resonance performance in arrays of devices, and show that 250 °C thermal annealing can enhance the performance and uniformity.