Magnetron-sputtered nanolaminate and superlattice coatings
2006
Thin film superlattice materials can exhibit physical, optical and mechanical properties very
different and superior to those of single layer counterparts. In the past fifteen years, hard coating,
optical and electrical device technologies have advanced beyond the use of single layer coatings
with the development of nanoscale compositionally modulated coatings, or superlattices and
nanocomposites. A typical superlattice consists of hundreds to thousands of nm-scale layers with
alternating compositions and/or crystalline phases. It is possible to engineer the electrical and
mechanical properties by choice of layer thicknesses and compositions. Typical layer thicknesses
are between 2 and 100 nm. We report of three types of superlattice coatings: (1) AlN/Si3N 4 optical
superlattice for abrasion protection of ZnS IR windows, (2) Al/Cu structural superlattices and (3)
advanced thermoelectric superlattices. All superlattice coatings were deposited by DC and RF
reactive magnetron sputtering. The AlN/Si3N 4 superlattice had layer thicknesses of 2 nm and
exhibited a nanohardness of 35 GPa. The Al/Cu superlattice had layer thicknesses of 1.5 nm and a
hardness near 6.5 GPa and is being developed for lightweight optics for space applications. The
thermoelectric superlattice demonstrated a figure of merit (ZT) ~ 1.5 and is being developed for
power generation from waste heat sources.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
1
References
0
Citations
NaN
KQI