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Ion beam polishing of the nanodimensional relief of the surface of optical materials
Ion beam polishing of the nanodimensional relief of the surface of optical materials
2002
A.I. Stognij
O. M. Stukalov
N N Novitskij
Keywords:
Ceramic
Ion beam
Oxide minerals
Polishing
Surface finishing
Sputtering
Charged particle
Ion
Composite material
Mineralogy
Materials science
Beam (structure)
Optoelectronics
Deposition (law)
Correction
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