Precise measurement of micro bubble resonator thickness by internal aerostatic pressure sensing
2016
We develop a new, simple and non-destructive method to precisely measure the thickness of thin wall micro bubble resonators (MBRs) by using internal aerostatic pressure sensing. Measurement error of 1% at a bubble wall thickness of 2 μm is achieved. This method is applicable to both thin wall and thick wall MBR with high measurement accuracy.
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