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Development of hydrogen gas sensor using single-crystalline ZnO layer grown by sputter epitaxy
Development of hydrogen gas sensor using single-crystalline ZnO layer grown by sputter epitaxy
2018
Toshiya Kumei
Shota Nakamichi
Asuka Fujikawa
Kohei Ogura
Tomoki Shinta
A-i Mizuno
Ki Ando
Hiroyuki Shinoda
Nobuki Musukura
Keywords:
Sputtering
Epitaxy
Crystal
Materials science
Hydrogen
Inorganic chemistry
Chemical engineering
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