Packaging apparatus and packaging method of a hollow cathode sputtering target

In hollow cathode sputtering target, the size of the lid covering the space portion of the target is placed, one or more through-holes provided in the lid, is covered with a resin bag over them, vacuuming the interior packaging apparatus and method of a hollow cathode sputtering target, characterized in that. In hollow cathode sputtering target, and to provide a packaging apparatus and packaging method of a hollow cathode sputtering target can be vacuum suction to the inside of the hollow portion covered with the resin bag.