Micro-transformer devices using thin-film electroplated deposition

The authors report their results of fabricating micro-magnetic devices using their 20 /spl mu/m photolithographic process. In this technique, magnetic devices in silicon ICs use magnetic thin-films deposited by electroplating. The magnetic and electrical characteristics of fabricated micro-transformers are measured and reported. Tests show proper operation over high-voltage isolation boundaries. Future uses for these devices will be in micro-power converters for mobile applications.