LY RESONATING GRAVIMETRIC SENS M MASS SENSITIVITY AND HIGH LINE

In this paper, a laterally resonating gr with high linearity and uniform mas presented for biochemical sensor applic rare-cell detection. The sensor utilize placed, balanced, folded spring beam stru lateral motion of the proof mass displacement difference between the pr and edges. The dynamic mass sensitiv resonator is increased by using the ab properties of the resonators. It has been verified that the standard deviation frequency shift is 1.9% for different capt also been experimentally shown that the highly linearly for mass loads between 13