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Silicon Corrosion during Selective Silicon Nitride Etch with Hot Diluted Hydrofluoric Acid
Silicon Corrosion during Selective Silicon Nitride Etch with Hot Diluted Hydrofluoric Acid
2021
Philippe Garnier
Thomas Massin
Corentin Chatelet
Emmanuel Oghdayan
Jeffrey M. Lauerhaas
Carlos Morote
Jeffery W. Butterbaugh
Keywords:
Metallurgy
Hydrofluoric acid
Corrosion
Silicon nitride
Silicon
Materials science
Correction
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