A PIXE-RBS method for measuring partial sputtering yields of stainless steel

Abstract A collector method has been developed for measuring the partial sputtering yields of stainless steel constituents. The sticking probabilities of Cr-, Fe-, and Ni-atoms to a carbon collector are found to be close to unity. By combining a PIXE with an RBS analysis, each quantity of the constituent atoms deposited on the collector surface is micro-quantitatively measured with a good accuracy. When an SS304 plate is exposed to 25 keV He + ions in a vacuum of 10 −6 Torr range , no evident preferential sputtering is found among three constituent elements at a fluence of 4.9×10 19 He/cm 2 .