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Group IV Epi processing, evolution in CMOS from 90 to 10nm node
Group IV Epi processing, evolution in CMOS from 90 to 10nm node
2014
Roger Loo
Sathish Kumar Dhayalan
Andriy Hikavyy
Shinichi Ike
Dirk Rondas
Erik Rosseel
Yosuke Shimura
Johnny Steenbergen
Jianwu Sun
Wei Wang
Robert Langer
Keywords:
CMOS
Electronic engineering
Computer science
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