(Ba,Sr)TiO3 tunable capacitors with RF commutation quality factors exceeding 6000

The fabrication, measurement, and modeling of radio-frequency (RF), tunable interdigital capacitors (IDCs) are described. High quality factors of 200 in the S/L-bands combined with a 47% tunability are achieved by utilizing epitaxial (Ba,Sr)TiO3 films grown by hybrid molecular beam epitaxy on LaAlO3 substrates. The fabricated devices consisted of one-port and two-port IDCs embedded in ground-signal-ground, coplanar waveguide transmission lines to enable RF probing. Wideband RF scattering parameters under bias were measured from 100 MHz to 40 GHz. A commutation quality factor averaging 6000 across the L band is achieved. These are the highest reported values in this band.