CRYSTALLOGRAPHIC AND MAGNETIC CHARACTERISTICS OF c-AXIS ORIENTED Ba FERRITE LAYER DEPOSITED ON Pt(111) UNDERLAYER

Ba ferrite/Pt bilayered films were deposited on thermally oxidized Si wafers using plasma-free sputtering method, and the dependence of crystallographical and magnetic characteristics on the substrate temperature Ts and the effectiveness of Pt underlayers were investigated. Ba ferrite films deposited at Ts above 500 °C revealed superior c-axis orientation even without post-annealing. Ba ferrite films deposited at Ts in the range from 200 to 450 °C revealed excellent c-axis orientation and exhibited extremely low coercivity after post-annealing at 800 °C. These results suggest that the Pt underlayers may be useful to reduce crystallization temperature of Ba ferrite films.