Combination of excimer laser micromachining and replication processes suited for large scale production

Abstract Results are reported obtained by a process sequence comprising excimer laser ablation of microstructures, inverse replication by an electroplating process and second inverse replication by injection moulding (“Laser-LIGA”). Thus, the original microstructures, made from PMMA and novolak layers applying a commercial 193 nm excimer laser micromachining work-station and showing structural variety and aspect ratios up to 10, were replicated with high structural fidelity by a low cost process suited for large scale production.