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Direct synthesis of germanium sulphide glass planar waveguides by chemical vapour deposition (CVD)
Direct synthesis of germanium sulphide glass planar waveguides by chemical vapour deposition (CVD)
2004
Huang
Hewak
Badding
Keywords:
Materials science
Argon
Chemical vapor deposition
Planar
Sputtering
Germanium
Germanium compounds
Optoelectronics
Correction
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