Carbon nanotube film three-electrode gas temperature sensor and temperature measuring method thereof

The invention discloses a carbon nanotube film three-electrode gas temperature sensor and a temperature measuring method thereof. The sensor comprises a first electrode, a second electrode and a third electrode which are distributed in turn; the first electrode is provided with an air hole and a base the inner surface of which is adhered with a carbon nanotube film; the centre of the second electrode is provided with a lead-out hole; the plate face of the third electrode is provided with a blind hole; the three electrodes are mutually isolated. The method comprises the steps of: 1) placing a gas temperature sensor; 2) applying voltage on the electrodes; 3) measuring the output ion flow value of the sensor; 4) forming a sample with the measured value and a gas temperature calibration value, and establishing a gas temperature measuring database by using the sample and an interpolation sample; 5) constructing a data fusion instrument, and building a gas temperature measurement model; 6) inputting the actual measured value of the sensor into the measurement model to obtain an accurate gas temperature measurement value. The gas temperature sensor works at low voltage, has high sensitivity, good linearity and high accuracy for measuring gas temperature and can be used for measuring the temperatures of combustible, explosive and toxic gas.