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Tosiro Doi
Tosiro Doi
Kyushu University
Composite material
Surface roughness
Materials science
Particle
Polishing
1
Papers
8
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Polishing Characteristics of MnO2 Polishing Slurry on the Si-face of SiC Wafer
2018
International Journal of Precision Engineering and Manufacturing
Tao Yin
Tosiro Doi
Syuhei Kurokawa
Zhao Zhong Zhou
Kai Ping Feng
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Citations (8)
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