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Stefan Illhardt
Stefan Illhardt
Doping
Silicon
Heterojunction
Inorganic chemistry
Solar cell
2
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1
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0
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High Energy Ion Implantation: Novel Approach on “as-implanted” Dose Control Concept
2018
Anastasia Guseva
Shavkat Akhmadaliev
Jürgen Bischoff
Constantin Csato
Stefan Illhardt
André Zowalla
Michael Dr. Rüb
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Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor–insulator–semiconductor heterojunction solar cell
2015
Journal of Vacuum Science and Technology
Florian Talkenberg
Stefan Illhardt
G. Radnóczi
B. Pécz
Gabriele Schmidl
Alexander Schleusener
Kadyrjan Dikhanbayev
Gauhar Mussabek
Alexander S. Gudovskikh
Vladimir Sivakov
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