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Nilabh Roy
Nilabh Roy
Computer hardware
Photolithography
Nanoimprint lithography
Overlay
Compatibility (mechanics)
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Overlay models for nanoimprint lithography
2021
Nilabh Roy
Mario J. Meissl
Takahiro Yoshida
Anshuman Cherala
Xiaoming Lu
Jeffrey Klein
Mingji Lou
Jin Choi
Hiroyuki Sekiguchi
Takashi Shibayama
Mitsuru Hiura
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